Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972957 | Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Po-Chih Huang, Xuan Zheng | 2024-04-30 |