Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055228 | Valve for throttling gas flow from a semiconductor processing tool | Sheng-chun Yang, Chang-Bum Chun, Xuan Zheng, Tzu-Chuan Chao, Ren-Jyue Wang +1 more | 2024-08-06 |
| 11972957 | Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool | Sheng-chun Yang, Chih-Lung CHENG, Yi-Ming Lin, Yu-Hsiang Juan, Xuan Zheng | 2024-04-30 |