Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176253 | Deposition system and method | Wen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen | 2024-12-24 |
| 12104268 | Treatment system and method | Zong-Kun LIN, Hsuan-Chih Chu, Chien-Hsun Pan, Yen-Yu Chen | 2024-10-01 |
| 12033965 | Semiconductor device and method of forming the same | Wen-Hao Cheng, Yen-Yu Chen, Chih-Wei Lin | 2024-07-09 |
| 11920237 | Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber | Wen-Hao Cheng, Yen-Yu Chen | 2024-03-05 |