Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176253 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2024-12-24 |
| 12104268 | Treatment system and method | Zong-Kun LIN, Chien-Hsun Pan, Yen-Yu Chen, Yi-Ming Dai | 2024-10-01 |
| 12089506 | Target for MRAM | Wen-Hao Cheng, Yen-Yu Chen | 2024-09-10 |
| 12030008 | Particle remover and method | Wen-Hao Cheng, Yen-Yu Chen | 2024-07-09 |
| 11965237 | System and method for detecting abnormality of thin-film deposition process | Wen-Hao Cheng, Yen-Yu Chen | 2024-04-23 |