Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11975421 | Single bodied platen housing a detection module for CMP systems | Cheng-Ping Chen, Shih Chung Chen, Sheng-Tai Peng, Rong-Long Hung | 2024-05-07 |
| 11919126 | Monolithic platen | Cheng-Ping Chen, Shih Chung Chen, Sheng-Tai Peng | 2024-03-05 |