Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138735 | Multi-layered windows for use in chemical-mechanical planarization systems | Shih Chung Chen, Yi-Shao Lin, Ya-Jen Sheuh, Hung-Lin Chen, Ren-Dou Lee | 2024-11-12 |
| 12002647 | Adjustable support for arc chamber of ion source | Po-Tang Tseng, Ching-Heng Yen, Tai-Kun Kao | 2024-06-04 |
| 11975421 | Single bodied platen housing a detection module for CMP systems | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen, Rong-Long Hung | 2024-05-07 |
| 11919126 | Monolithic platen | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen | 2024-03-05 |