Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140857 | Method of fast surface particle and scratch detection for EUV mask backside | Chih-Cheng Chen, ShinAn KU, Hsin-Chang Lee | 2024-11-12 |
| 12013646 | High throughput and high position accurate method for particle inspection of mask pods | Shih-Jui Huang, ShinAn KU, Hsin-Chang Lee | 2024-06-18 |