Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, Shyue-Shin Tsai, Keith Kuang-Kuo Koai | 2024-01-02 |