Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164221 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2024-12-10 |
| 11859284 | Shower head structure and plasma processing apparatus using the same | Huan-Chieh Chen, JHIH-REN LIN, TAI-PIN LIU, Shyue-Shin Tsai | 2024-01-02 |