Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170208 | Method for managing temperature in semiconductor fabrication facility | Ying-Yen Tseng, Wen-Yu Ku, Chia-Chih Chen | 2024-12-17 |
| 12033873 | Wafer cooling system | Chia-Chih Chen | 2024-07-09 |
| 11996276 | Ion collector for use in plasma systems | Chi-Ying Wu, Chia-Chih Chen | 2024-05-28 |