Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025923 | Lithography system and operation method thereof | Chi-Hung Liao | 2024-07-02 |
| 12020963 | Method of performing a substrate detection process | Chi-Hung Liao | 2024-06-25 |
| 12007691 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2024-06-11 |
| 11923187 | Cleaning method and apparatus | Chi-Hung Liao | 2024-03-05 |
| 11923231 | Substrate table with vacuum channels grid | Chi-Hung Liao | 2024-03-05 |
| 11899378 | Lithography system and operation method thereof | Chi-Hung Liao | 2024-02-13 |