Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131939 | Substrate transfer robot for transferring substrate in vacuum chamber | Soo Jong Lee, Chang Seong Lee, Seung Young Baek | 2024-10-29 |
| 12080586 | Substrate transfer robot for transferring substrate in vacuum chamber | Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Chang Hyun Jee +3 more | 2024-09-03 |