Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080586 | Substrate transfer robot for transferring substrate in vacuum chamber | Soo Jong Lee, Myung Jin Kim, Chang Seong Lee, Seung Young Baek, Sang Hwi Ham +3 more | 2024-09-03 |