Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920576 | Cryopump and method of monitoring cryopump | — | 2024-03-05 |
| 11885321 | Cryopump, cryopump system, and method for starting operation of cryopump | Toshiyuki Kimura | 2024-01-30 |