Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940463 | Particle measurement device, three-dimensional shape measurement device, prober device, particle measurement system, and particle measurement method | Natsumi Hayashi, Hideki Morii, Tetsuo Yoshida | 2024-03-26 |
| 11885321 | Cryopump, cryopump system, and method for starting operation of cryopump | Takahiro Yatsu | 2024-01-30 |