Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040216 | Substrate supporting member, substrate treating apparatus including the same and substrate treating method thereof | Kang Suk Lee, Hyeon Jun Lee, So Young Jang | 2024-07-16 |
| 11981995 | Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatus | Dohyeon YOON, Heehwan Kim, Ji-Young Lee, Young-Su Kim | 2024-05-14 |