Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981995 | Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatus | Yong Hoon HONG, Heehwan Kim, Ji-Young Lee, Young-Su Kim | 2024-05-14 |
| 11862491 | Apparatus and method for treating substrate | Joo Jib Park, Jin Se PARK | 2024-01-02 |