Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176215 | Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium | Taiki HINODE, Kensuke Shinohara | 2024-12-24 |
| 12142502 | Processing condition selection method, substrate processing method, substrate product production method, processing condition selecting device, computer program, and storage medium | Takashi Ota, Makoto Takaoka, Hiroshi Horiguchi | 2024-11-12 |