Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176215 | Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium | Toru Edo, Kensuke Shinohara | 2024-12-24 |
| 12080566 | Substrate treating apparatus and substrate treating method | Takashi Ota, Mitsukazu Takahashi, Kazuhiro Honsho, Yusuke Akizuki | 2024-09-03 |