Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036583 | Substrate cleaning device and substrate cleaning method | Tomoyuki Shinohara, Junichi Ishii, Kazuki Nakamura, Yoshifumi OKADA, Takuma Takahashi +1 more | 2024-07-16 |
| 12036662 | Substrate processing apparatus and substrate processing method | Tomoyuki Shinohara, Yoshifumi OKADA | 2024-07-16 |
| 12017257 | Substrate cleaning device and substrate cleaning method | Tomoyuki Shinohara, Kazuki Nakamura, Yoshifumi OKADA, Takuma Takahashi, Takashi Shinohara +1 more | 2024-06-25 |