Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128451 | Substrate processing system and substrate processing method | Hiroaki Ishii, Kazuhiro Honsho | 2024-10-29 |
| 12036583 | Substrate cleaning device and substrate cleaning method | Tomoyuki Shinohara, Kazuki Nakamura, Yoshifumi OKADA, Takuma Takahashi, Takashi Shinohara +1 more | 2024-07-16 |
| 12017257 | Substrate cleaning device and substrate cleaning method | Tomoyuki Shinohara, Kazuki Nakamura, Yoshifumi OKADA, Takuma Takahashi, Takashi Shinohara +1 more | 2024-06-25 |