Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119242 | Film processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2024-10-15 |
| 11986853 | Substrate processing apparatus, film formation unit, substrate processing method and film formation method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2024-05-21 |