Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119242 | Film processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2024-10-15 |
| 12035576 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2024-07-09 |
| 11986853 | Substrate processing apparatus, film formation unit, substrate processing method and film formation method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2024-05-21 |