Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12021040 | Overlay mark forming Moire pattern, overlay measurement method using same, and manufacturing method of semiconductor device using same | Hyun Chul Lee, Hyun Jin Chang, Young Je WOO | 2024-06-25 |