Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107052 | Overlay mark forming Moire pattern, overlay measurement method using same, overlay measurement apparatus using same, and manufacturing method of semiconductor device using same | Hyun Chul Lee | 2024-10-01 |
| 12021040 | Overlay mark forming Moire pattern, overlay measurement method using same, and manufacturing method of semiconductor device using same | Hyun Chul Lee, Sung-Hoon Hong, Young Je WOO | 2024-06-25 |