Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077681 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Ji Ho LEE, Young-Gi LEE, Hyun Woo Lee, Chang Suk Lee, Jong Won Lee | 2024-09-03 |