Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984345 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Nohsung Kwak | 2024-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984345 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Nohsung Kwak | 2024-05-14 |