Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065734 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Jae Wan Lee, Byung Gwan LIM | 2024-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065734 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Jae Wan Lee, Byung Gwan LIM | 2024-08-20 |