Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170188 | Substrate processing apparatus and interlock method thereof | Sang Kyo KWON | 2024-12-17 |
| 12065734 | Chamber cleaning device and chamber cleaning method | Dong Hwan Lee, Jae-Ho Kim, Hyun I. Kim, Ho Jin Yun, Byung Gwan LIM | 2024-08-20 |