Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12013682 | Remote-plasma clean (RPC) directional-flow device | Michael J. Janicki | 2024-06-18 |
| 11946142 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Matthew Mudrow, Nick Ray Linebarger, Jr., Xin Yin +1 more | 2024-04-02 |