Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050112 | Distance measurement between gas distribution device and substrate support at high temperatures | Mark E. Emerson | 2024-07-30 |
| 11946142 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Matthew Mudrow, Xin Yin, James Lee +1 more | 2024-04-02 |