Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104891 | Spatially filtered talbot interferometer for wafer distortion measurement | Daniel Gene Smith, Hidemitsu Toba, Shunsuke Kibayashi, Katsura Otaki, Eric Peter Goodwin | 2024-10-01 |