Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104891 | Spatially filtered talbot interferometer for wafer distortion measurement | Goldie Goldstein, Hidemitsu Toba, Shunsuke Kibayashi, Katsura Otaki, Eric Peter Goodwin | 2024-10-01 |
| 11982521 | Measurement of a change in a geometrical characteristic and/or position of a workpiece | Michael Binnard | 2024-05-14 |
| 11934105 | Optical objective for operation in EUV spectral region | David M. Williamson | 2024-03-19 |