Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12075554 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Ilya Pokidov, Atul Gupta | 2024-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12075554 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Ilya Pokidov, Atul Gupta | 2024-08-27 |