Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12075554 | Plasma source having a dielectric plasma chamber with improved plasma resistance | Xing Chen, Atul Gupta | 2024-08-27 |
| 11956885 | Method and apparatus for impedance matching in a power delivery system for remote plasma generation | Mohammad Kamarehi, Kenneth B. Trenholm, Fedir Viktorovych Teplyuk | 2024-04-09 |