Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057295 | RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variations | Youn Gi Hong, WeiWu ZHONG, Himanshu Chokshi | 2024-08-06 |