Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180607 | Electrochemical deposition system including optical probes | Andrew James Pfau, Shantinath Ghongadi, Zhian He | 2024-12-31 |
| 12158706 | Lithographic apparatus and method with improved contaminant particle capture | Marcus Adrianus Van De Kerkhof | 2024-12-03 |
| 12105039 | Systems and methods for in-situ measurement of sheet resistance on substrates | Andrew James Pfau, Douglas Hill, Douglas Koeller, Burton Williams, Shantinath Ghongadi | 2024-10-01 |
| 11906907 | Apparatus and method for determining a condition associated with a pellicle | Derk Servatius Gertruda Brouns, Joshua Adams, Aage Bendiksen, Richard David Jacobs, Andrew Judge +5 more | 2024-02-20 |