Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106940 | Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes | Jiro Yokota, Chih-Yu Hsu, Peng Shen, Nathan Stafford | 2024-10-01 |