Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106940 | Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes | Ayaka NISHIYAMA, Jiro Yokota, Chih-Yu Hsu, Peng Shen | 2024-10-01 |
| 12106971 | High conductive passivation layers and method of forming the same during high aspect ratio plasma etching | Xiangyu Guo, Kayla Diemoz | 2024-10-01 |
| 12083493 | Selective adsorption of halocarbon impurities containing cl, br and i in fluorocarbons or hydrofluorocarbons using adsorbent supported metal oxide | Anup Doraiswamy | 2024-09-10 |