Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065758 | Method for manufacturing a SiC substrate by simultaneously forming a growth layer on one surface and etching another surface of a SiC base substrate | Tadaaki Kaneko, Kazufumi Aoki | 2024-08-20 |
| 11972949 | SiC substrate manufacturing method and manufacturing device, and method for reducing work-affected layer in sic substrate | Tadaaki Kaneko, Kazufumi Aoki | 2024-04-30 |