Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170221 | Apparatus for processing substrate | Won Woo Jung, Young Rok Kim, Yoo Seong Kim, Jong Sik Kim | 2024-12-17 |
| 12142515 | Substrate processing apparatus | Donghyuk Oh, Su-Young Kwon, Jongsik Kim | 2024-11-12 |
| 12106941 | Substrate processing device and substrate processing method | — | 2024-10-01 |
| 12032013 | Substrate inspection device and substrate inspection method | Gu Hyun JUNG, Young Rok Kim, Se-Yong Oh, Jin An JUNG | 2024-07-09 |
| 12024774 | Apparatus for supplying gas and apparatus for processing substrate using the same | Ki Bum Kim, Yun Gyu HA, Jong Sik Kim, Il Hyung Cho | 2024-07-02 |
| 11970770 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Heon Do Kim | 2024-04-30 |