Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970770 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Chul Joo HWANG | 2024-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970770 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Chul Joo HWANG | 2024-04-30 |