Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136548 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Kenichi Ohmori, Ryosuke Sato, Nobuo Oku | 2024-11-05 |
| 11992896 | Laser irradiation apparatus, laser irradiation method, and semiconductor device manufacturing method | Kenichi Ohmori | 2024-05-28 |
| 11938563 | Annealed workpiece manufacturing method, laser anneal base stage, and laser anneal processing apparatus | — | 2024-03-26 |
| 11894229 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Kenichi Ohmori, Ryosuke Sato, Nobuo Oku | 2024-02-06 |