Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136548 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Suk-Hwan Chung, Ryosuke Sato, Nobuo Oku | 2024-11-05 |
| 11992896 | Laser irradiation apparatus, laser irradiation method, and semiconductor device manufacturing method | Suk-Hwan Chung | 2024-05-28 |
| 11894229 | Laser annealing apparatus, laser annealing method, and method for manufacturing semiconductor device | Suk-Hwan Chung, Ryosuke Sato, Nobuo Oku | 2024-02-06 |