Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165841 | Dual-frequency, direct-drive inductively coupled plasma source | Maolin Long, Alexander Paterson | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165841 | Dual-frequency, direct-drive inductively coupled plasma source | Maolin Long, Alexander Paterson | 2024-12-10 |