Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157184 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Yoshio Kawabe, Yosuke TATSUZAKI | 2024-12-03 |
| 12121991 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Shigeki EGAMI, Yoshio Kawabe, Yosuke TATSUZAKI | 2024-10-22 |
| 12007702 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2024-06-11 |
| 11977339 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2024-05-07 |
| 11969822 | Processing method and processing system | — | 2024-04-30 |
| 11911844 | Shaping apparatus and shaping method | — | 2024-02-27 |