Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157184 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Yosuke TATSUZAKI, Yuichi Shibazaki | 2024-12-03 |
| 12121991 | Processing apparatus, and manufacturing method of movable body | Masayuki Shiraishi, Shigeki EGAMI, Yosuke TATSUZAKI, Yuichi Shibazaki | 2024-10-22 |
| 11934104 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Hideki Komatsuda | 2024-03-19 |