Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051576 | Multicathode deposition system and methods | Sanjay Bhat | 2024-07-30 |
| 11940724 | Reticle processing system | Sanjay Bhat | 2024-03-26 |
| 11860528 | Multi-chamber substrate processing platform | Ribhu Gautam, Sanjay Bhat, Praveen Kumar Choragudi, Vinodh Ramachandran, Arun Rengaraj | 2024-01-02 |
| 11860533 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Azeddine Zerrade | 2024-01-02 |