Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860533 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Azeddine Zerrade, Vibhu Jindal | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860533 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Azeddine Zerrade, Vibhu Jindal | 2024-01-02 |