Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12168301 | Fixture for automatic calibration of substrate transfer robot | Richard M. Blank, Aravind Alwan, Behnam BEHZIZ, Peter Thaulad | 2024-12-17 |
| 12050112 | Distance measurement between gas distribution device and substrate support at high temperatures | Nick Ray Linebarger, Jr. | 2024-07-30 |